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Technical details about CAS-75-77-4, learn more about the structure, uses, toxicity, action, side effects and more

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2D Structure
1. Also known as: 75-77-4, Trimethylchlorosilane, Trimethylsilyl chloride, Silane, chlorotrimethyl-, Chloro(trimethyl)silane, Trimethyl chlorosilane
Molecular Formula
C3H9ClSi
Molecular Weight
108.64  g/mol
InChI Key
IJOOHPMOJXWVHK-UHFFFAOYSA-N
FDA UNII
62UO4690X6

1 2D Structure

2D Structure

2 Identification
2.1 Computed Descriptors
2.1.1 IUPAC Name
chloro(trimethyl)silane
2.1.2 InChI
InChI=1S/C3H9ClSi/c1-5(2,3)4/h1-3H3
2.1.3 InChI Key
IJOOHPMOJXWVHK-UHFFFAOYSA-N
2.1.4 Canonical SMILES
C[Si](C)(C)Cl
2.2 Other Identifiers
2.2.1 UNII
62UO4690X6
2.3 Synonyms
2.3.1 MeSH Synonyms

1. Trimethylchlorosilane

2.3.2 Depositor-Supplied Synonyms

1. 75-77-4

2. Trimethylchlorosilane

3. Trimethylsilyl Chloride

4. Silane, Chlorotrimethyl-

5. Chloro(trimethyl)silane

6. Trimethyl Chlorosilane

7. Monochlorotrimethylsilicon

8. Tmcs

9. Silane, Trimethylchloro-

10. Silicane, Chlorotrimethyl-

11. Tmscl

12. Silylium, Trimethyl-, Chloride

13. Tl 1163

14. (ch3)3sicl

15. Me3sicl

16. Nsc 15750

17. Chlorotrimethyl Silane

18. Tms-cl

19. Chloro-trimethyl-silane

20. Trimethylsilane Chloride

21. Monochlorotrimethylsilane

22. Chebi:85069

23. Nsc-15750

24. 62uo4690x6

25. Ccris 790

26. Chloro-trimethylsilane

27. Hsdb 1009

28. Einecs 200-900-5

29. Mfcd00000502

30. Un1298

31. Brn 1209232

32. Tms Chloride

33. Tms-chloride

34. Unii-62uo4690x6

35. Trimethylchlorsilan

36. Chlorotrimethlsilane

37. Chlorotrimethylsilan

38. Chlorotrimethysilane

39. Chlorotrimetylsilane

40. Chlortrimethylsilane

41. Chorotrimethylsilane

42. Silylium, Chloride

43. Trimethylchlorosilan

44. Trimethylchlorsilane

45. Trimethylchorosilane

46. Clsime3

47. Sime3cl

48. Chiorotrimethylsilane

49. Trimethyichlorosilane

50. Trimethylchiorosilane

51. Trimethylsilylchoride

52. Trimethysilylchloride

53. Trimethyl-chlorsilane

54. Trimethylsilylchloride

55. Chloro Trimethylsilane

56. Chlorotrimethyl-silane

57. Trimethyl-chlorosilane

58. Trimethylchloro Silane

59. Trimethysilyl Chloride

60. Trimehtylsilyl Chloride

61. Trimethylsilyl-chloride

62. Trimethyl Silylchloride

63. Chloro Trimethyl Silane

64. Chloro-trimethyl Silane

65. Trimethyl(chlorosilane)

66. Trimethyl-chloro-silane

67. Tri-methylsilyl Chloride

68. Trimethyl Silyl Chloride

69. Trimethyl-silyl Chloride

70. Trimethylsilanyl Chloride

71. Chloro(trimethyl)-silane

72. Chloranyl(trimethyl)silane

73. Dsstox_cid_4822

74. Ec 200-900-5

75. Schembl1319

76. Dsstox_rid_77543

77. Dsstox_gsid_24822

78. 4-04-00-04007 (beilstein Handbook Reference)

79. Trimethylsilyl Chloride, Tmcs

80. Chlorotrimethylsilane, >=97%

81. Chembl1505385

82. Dtxsid2024822

83. Chlorotrimethylsilane [mi]

84. Ka 31

85. Wln: G-si-1&1&1

86. Amy15614

87. Bcp30036

88. Nsc15750

89. Tsl 8031

90. Tox21_200221

91. Stl185543

92. Akos000120043

93. Zinc169743009

94. Un 1298

95. Cas-75-77-4

96. Chlorotrimethylsilane, >=98.0% (gc)

97. Ncgc00091812-01

98. Ncgc00091812-02

99. Ncgc00257775-01

100. Bp-21151

101. Chlorotrimethylsilane;trimethyl Chlorosilane

102. Db-031359

103. Ft-0623705

104. Chlorotrimethylsilane Solution, 1.0 M In Thf

105. Chlorotrimethylsilane, Puriss., >=99.0% (gc)

106. A838505

107. Q420183

108. J-520042

109. J-802175

110. Trimethylchlorosilane [un1298] [flammable Liquid]

111. Chlorotrimethylsilane, Purified By Redistillation, >=99%

112. F0001-1904

113. Chlorotrimethylsilane Solution, 1.0 M In Methylene Chloride

114. Chlorotrimethylsilane, For Gc Derivatization, >=99.0% (gc)

115. Chlorotrimethylsilane, Produced By Wacker Chemie Ag, Burghausen, Germany, >=99.0% (gc)

2.4 Create Date
2005-03-26
3 Chemical and Physical Properties
Molecular Weight 108.64 g/mol
Molecular Formula C3H9ClSi
Hydrogen Bond Donor Count0
Hydrogen Bond Acceptor Count0
Rotatable Bond Count0
Exact Mass108.0162045 g/mol
Monoisotopic Mass108.0162045 g/mol
Topological Polar Surface Area0 Ų
Heavy Atom Count5
Formal Charge0
Complexity28.4
Isotope Atom Count0
Defined Atom Stereocenter Count0
Undefined Atom Stereocenter Count0
Defined Bond Stereocenter Count0
Undefined Bond Stereocenter Count0
Covalently Bonded Unit Count1
4 Pharmacology and Biochemistry
4.1 MeSH Pharmacological Classification

Indicators and Reagents

Substances used for the detection, identification, analysis, etc. of chemical, biological, or pathologic processes or conditions. Indicators are substances that change in physical appearance, e.g., color, at or approaching the endpoint of a chemical titration, e.g., on the passage between acidity and alkalinity. Reagents are substances used for the detection or determination of another substance by chemical or microscopical means, especially analysis. Types of reagents are precipitants, solvents, oxidizers, reducers, fluxes, and colorimetric reagents. (From Grant and Hackh's Chemical Dictionary, 5th ed, p301, p499) (See all compounds classified as Indicators and Reagents.)


4.2 Absorption, Distribution and Excretion

... Absorption through the skin can be expected ... /and/ is supported by the findings from an acute dermal toxicity study ... although the corrosive nature of chlorotrimethylsilane may have enhanced dermal penetration by breaking down normal barriers.

Health Council of the Netherlands: Dutch Expert Committee on Occupational Standards. Chlorotrimethylsilane; Health-based recommended occupational exposure limit. p. 27. The Hague: Health Council of the Netherlands, 2001; publication no. 2001/05OSH.


The substance can be absorbed into the body by inhalation of its vapor and by ingestion.

IPCS, CEC; International Chemical Safety Card on Trimethylchlorosilane. (March 2002). Available from, as of October 16, 2006: https://www.inchem.org/documents/icsc/icsc/eics0966.htm


4.3 Metabolism/Metabolites

Chlorotrimethylsilane will be rapidly hydrolyzed upon contact with tissue fluid releasing hydrogen chloride and trimethylsilanol which condenses to form hexamethyldisiloxane and water ... Trimethylsilanol /is considered/ to be a stable compound that will not be metabolized to a great extent. In view of the rapid hydrolysis in aqueous environments, it is obvious that toxicokinetic studies, even at low concentrations, are difficult to carry out.

Health Council of the Netherlands: Dutch Expert Committee on Occupational Standards. Chlorotrimethylsilane; Health-based recommended occupational exposure limit. p. 27. The Hague: Health Council of the Netherlands, 2001; publication no. 2001/05OSH.


... Chlorosilanes will be rapidly hydrolyzed upon contact with tissue fluids to release hydrochloric acid. /Chlorosilanes/

ITC/USEPA; Information Review #223 (Draft) Chlorosilanes p.7 (1981)


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